Amtech Systems, Inc.

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Amtech Systems, Inc.
Type Public
Industry Information Technology and Services
Founded 1999
Headquarters South Clark Drive Tempe, Arizona, US
Key people Fokko Pentinga (CEO), Jong S. Whang, Robert T. Hass (CFO), Egbert Jan Gert Goudena [1]
Number of employees 51 - 200

Amtech Systems, Inc. is a manufacturer of capital equipment, including thermal processing, silicon wafer handling automation and related consumables used in fabricating solar cells, light-emitting diode (LED) and semiconductor devices. The Company's segments include Solar, Semiconductor and Polishing. Its Solar segment supplies thermal processing systems, including diffusion, plasma-enhanced chemical vapor deposition (PECVD), atomic layer deposition (ALD), related automation, parts and services, to the solar/photovoltaic industry. Its Semiconductor segment supplies thermal processing equipment, including solder reflow equipment and related controls for use by semiconductor manufacturers, and in electronics assembly for automotive and other industries. Its Polishing segment produces consumables and machinery for lapping and polishing of materials, such as sapphire substrates, optical components, silicon wafers, and various types of crystalline materials, ceramics and metal components. [2]


  • 1980’s
  • Foundation of Amtech Systems, Inc: October 1981
  • Initial Public Offering: Listed on NASDAQ: ASYS : August 1983
  • Acquired ATMOSCAN® patent, leading to development of its worldwide marketing channel and leading-edge semiconductor fabricators as customers: July 1984
  • 1990’s
  • Developed and sold first IBAL Automation product:September 1992
  • Secondary Public Offering - (proceeds used to):December 1994
  • Start operations in Europe with the founding of Tempress Systems, Inc., which is known for its quality diffusion furnaces:1994-1995
  • Acquired PR Hoffman, an industry leader in double-sided lapping and polishing machines, carriers and waxless mount templates for single-side polishing of semiconductor silicon wafers:July 1997
  • 2000's
  • Acquired BTI, a manufacturer of horizontal diffusion furnaces and VCVD furnaces for the semiconductor industry:June 2004
  • Acquired R2D Ingenrie, manufacturer of wafer automation solutions for the solar and semiconductor industry:October 2007
  • 2010's
  • Acquired majority interest of Kingstone Semiconductor for the development and production of solar ion implantation systems:February 2011
  • Record revenues of $247M fueled by industry leading solar diffusion furnace systems:September 2011
  • Acquired majority interest of SoLayTec, a manufacturer of spatial Atomic Deposition tools for the solar industry: December 2014
  • Acquired BTU, a manufacturer of advanced thermal processing equipment : January 2015



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